| （Patterned Sapphire Substrate, PSS） | ||
| Item | 2" | 4" |
| Crystal | LED Grade Sapphire | LED Grade Sapphire |
| Sapphire purity | ≥99.998% | ≥99.998% |
| Color | Transparent | Transparent |
| Orientation | C plane tiled M axis 0.20°±0.1° | C plane tiled M axis 0.20°±0.1° |
| Diameter | 50.8±0.1mm | 100±0.2mm |
| Thickness | 430±10μm | 650±10μm |
| Primary Flat Location | A-axis ± 0.2° | A-axis ± 0.2° |
| Flat Length | 16.0±1.0 mm | 30.0 ±1.0 mm |
| Front side surface | Epi-ready patterned surface | Epi-ready patterned surface |
| Back side surface | Fine ground; Ra < 1.2 um | Fine ground; Ra < 1.2 um |
| TTV | ≤ 5.0μm | ≤ 10μm |
| BOW | ≤ -10μm | ≤ -20μm |
| Pattern diameter | 2.7±0.15 um | 2.7±0.15 um |
| Pattern height | 1.6±0.15 um | 1.6±0.15 um |
| Pattern space | 0.3±0.15 um | 0.3±0.15 um |
| Pattern arrangement | Close-packed arrangement; hexagonal type | Close-packed arrangement; hexagonal type |
| Defective patterns | Total defective area ≦3% of wafer area; Inspection by naked eye added without bright light | Total defective area ≦5% of wafer area; Inspection by naked eye added without bright light |
| Scratch | Visible to naked eye added without bright light; | Visible to naked eye added without bright light; |
| total length < 3mm | total length < 5mm | |
| Package | Cleanroom, vacuum packing | Cleanroom, vacuum packing |
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