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4 INCH C-PLANE(0001) SAPPHIRE WAFERS

Sapphire wafer is being used extensively as a substrate for III-V nitrides and for many other epitaxial films. We supply 99.999% high purity sapphire wafers with an excellent surface finish to meet your rigorous requirements.

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4 INCH C-PLANE(0001) SAPPHIRE WAFERS

Customized sapphire wafers and windows are available upon request. Sapphire wafer is being used extensively as a substrate for III-V nitrides and for many other epitaxial films. We supply 99.999% high purity sapphire wafers with an excellent surface finish to meet your rigorous requirements.

Based on the continuous upgrade of sapphire technology and the rapid expansion of the application market, 4 inch and 6-inch substrate wafers will be more adopted by mainstream chip companies due to their inherent advantages in production utilization.

WDQ OPTICS supplies a wide range of sapphire wafers either from stock or custom-made to your specification for various applications. The Epi-Ready grade sapphire wafers have no particles, no cracks or pores, no scratches, or other defects. All the wafers and sapphire substrates are traceable with respect to the cassette numbers marked on the label.

Specifications of 4 Inch C-plane(0001) Sapphire Wafers

Item	4-inch C-plane(0001) 650μm Sapphire Wafers
Crystal Materials	99,999%, High Purity, Monocrystalline Al2O3
Grade	Prime, Epi-Ready
Surface Orientation	C-plane(0001)
	C-plane off-angle toward M-axis 0.2 +/- 0.1°
Diameter	100.0 mm +/- 0.1 mm
Thickness	650 μm +/- 25 μm
Primary Flat Orientation	A-plane(11-20) +/- 0.2°
Primary Flat Length	30.0 mm +/- 1.0 mm
Single Side Polished	Front Surface	Epi-polished, Ra < 0.2 nm (by AFM)
(SSP)	Back Surface	Fine ground, Ra = 0.8 μm to 1.2 μm
Double Side Polished	Front Surface	Epi-polished, Ra < 0.2 nm (by AFM)
(DSP)	Back Surface	Epi-polished, Ra < 0.2 nm (by AFM)
TTV	< 20 μm
BOW	< 20 μm
WARP	< 20 μm
Cleaning / Packaging	Class 100 cleanroom cleaning and vacuum packaging,
	25 pieces in one cassette packaging or single piece packaging.